Facilities at the MMTC
Located in the School of Electrical and Computer Engineering at the City Campus of RMIT University, the MMTC houses an extensive range of fabrication, deposition and characterisation equipment. The equipment, listed below, is used by affiliated academic staff, research fellows, Ph.D. scholars, and collaborating researchers. Fabrication services are also provided to research institutes, organisations, and industry.
The fabrication, deposition, and characterisation facilities within the MMTC are complemented by a comprehensive suite of material analysis equipment and expertise available within the School of Applied Science at RMIT University.
Karl Süss MA6/BA6 Mask Aligner
Süss MicroTec SB6L Wafer Bonder
RF-DC Dual Source Magnetron Sputterer
Photolithography and Cleanroom Processing
- Class 100 photolithography cleanroom
- Class 1,000 photolithography cleanroom
- Karl Süss RC8 spin coater
- Karl Süss MA6/BA6 mask aligner
- Karl Süss MJB3 mask aligner (×2)
- Oxidation furnaces
- Diffusion furnaces
- Vacuum furnace
- Wet/Chemical processing facilities
- Gold electroplating
- Silicon bulk micromachining
- Süss MicroTec SB6L wafer bonder (ARC LE0989726)
Thin Film Deposition and Processing
- Customised Kurt J. Lesker PVD75 RF and DC magnetron sputterer (ARC LE0882246)
- RF magnetron sputterer
- Kurt J. Lesker PVD75 electron beam evaporator
- Balzers BAK500 electron beam evaporator
- Thermal evaporator
- Reactive ion etcher
- Barrel etcher
- Ambios XP-2 surface profilometer
Device Preparation and Packaging
- Disco Hi-Tec DAD321 automatic dicing saw
- Thermosonic wirebonder (gold, aluminium)
- Flip chip bonder
- Logitech lapping and optical polishing station
- Newport AutoAlign optical fibre pigtailing systems (×2)
Soft Lithography and Microfluidics
- Microfabrication of SU-8 masters
- Programmable hotplates
- Programmable micromill
- PDMS (Silicone) processing
- Micrometer adjustable thin film applicator
- High throughput fabrication of lab-on-a-chip and microfluidic devices
- Nanoimprinting and replication capabilities
- Programmable Harvard syringe pump
- Dolomite Pressure Pump
- Dolomite droplet microfluidic kit
- Flow characterisation by micro particle image velocimetry (μPIV)
Characterisation Laboratories
- Integrated Optics
- Lab on a Chip and Microfluidics
- Sensor Technology
- Microelectronics